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MICROELECTRODE FOR MEASURING EMG OF LABORATORY MICROFAUNA AND METHOD FOR MANUFACTURING THE SAME, AND SYSTEM FOR MEASURING EMG OF LABORATORY MICROFAUNA USING MICROELECTRODE
MICROELECTRODE FOR MEASURING EMG OF LABORATORY MICROFAUNA AND METHOD FOR MANUFACTURING THE SAME, AND SYSTEM FOR MEASURING EMG OF LABORATORY MICROFAUNA USING MICROELECTRODE
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机译:用于实验室微动植物肌电测量的微电极及其制造方法,以及使用微电极测量实验室微动植物肌电的系统
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摘要
The present disclosure relates to a microelectrode for measuring EMG signals of a laboratory microfauna. The present disclosure includes a metal plate with an insulating plate deposited on a surface, a plurality of silicon substrates disposed on the insulating plate, the silicon substrates being electrically connected to the metal plate, covered with an insulator, and adjacent to one another, and a plurality of needle electrodes, each formed on the respective silicon substrates as an integral part thereof, wherein the needle electrodes have the same predetermined length, have a tapered shape from the respective silicon substrates, are spaced apart from each other by a predetermined distance, and wherein a metallic layer is formed on each of the needle electrodes by depositing metal materials, the insulator is formed on the metallic layer, and a portion of the metallic layer at a tip is exposed.
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