METHOD AND APPARATUS FOR REMOVING EXPERIMENTAL ARTIFACTS FROM ENSEMBLE IMAGES

摘要

A method and apparatus wherein a photoluminescence in a semiconductor wafer is excited using an ultraviolet light source. A plurality of partial raw images of the photoluminescence is generated. The plurality of partial raw images includes at least one equipment-generated artifact The at least one equipment-generated artifact is removed from the cluster of partial raw images using the equipment-generated artifact image to generate a cluster of partial processed images. A plurality of clusters of partial processed images is generated. The plurality of clusters of partial processed images are aligned and combined to generate a wafer image tree of the at least one equipment-generated artifact.