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Silicon carbide powder comprising alpha phase silicon carbide granules of trimodal particle size distribution and low impurities
Silicon carbide powder comprising alpha phase silicon carbide granules of trimodal particle size distribution and low impurities
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机译:包含三峰粒度分布和低杂质的α相碳化硅颗粒的碳化硅粉末
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摘要
A silicon carbide powder includes at least one group selected from a first group comprising an alpha phase silicon carbide pulverulent body of which a granule size (D50) is greater than 0 μm and less than 45 μm with impurities less than 10 ppm, a second group comprising an alpha phase silicon carbide pulverulent body of which a granule size is greater than 45 μm and less than 75 μm with impurities less than 10 ppm, and a third group comprising an alpha phase silicon carbide pulverulent body of which a granule size is greater than 75 μm and less than 110 μm with impurities less than 10 ppm. In addition, a method for preparing a silicon carbide powder includes adding seeds to a beta silicon carbide powder, and forming an alpha silicon carbide powder by heat treating the beta silicon carbide powder.
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