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Microwave integrated circuit (MMIC) damascene electrical interconnect for microwave energy transmission
Microwave integrated circuit (MMIC) damascene electrical interconnect for microwave energy transmission
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机译:用于微波能量传输的微波集成电路(MMIC)镶嵌电气互连
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摘要
A semiconductor structure having a semiconductor layer having an active device therein. A dielectric structure is disposed over the semiconductor layer, such dielectric structure having open ended trench therein. An electrical interconnect level is disposed in the trench and electrically connected to the active device. A plurality of stacked metal layers is disposed in the trench. The stacked metal layers have disposed on bottom and sidewalls thereof conductive barrier metal layers.
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