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Apparatus and method for continuous synthesis of carbon film or inorganic material film
Apparatus and method for continuous synthesis of carbon film or inorganic material film
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机译:连续合成碳膜或无机材料膜的装置和方法
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摘要
An apparatus for continuous synthesis of carbon film or inorganic material film includes an external chamber having a gas intake gate and a gas exhaust gate; a substrate transporting apparatus disposed inside the external chamber and including a rolling-out member, a plurality of rollers, a rolling-in member, and a moving path; a substrate with metal conveyed along the moving path; a temperature controller correspondingly disposed above or under the substrate transporting apparatus, wherein when the substrate with metal passes through the temperature controller, the temperature controller heats the substrate with metal; a vacuum system connected to the external chamber and inhaling a gas through the gas intake gate and exhausting the gas through the gas exhaust gate; and a gas source controller connected to the external chamber and controlling a supply of the gas, wherein the gas includes a carbon source or an inorganic material source.
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