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Moisture scavenging layer for thinner barrier application in beol integration
Moisture scavenging layer for thinner barrier application in beol integration
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机译:防潮层,用于beol集成中更薄的屏障应用
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摘要
A method of forming a thinner barrier/liner stack for vias and metal lines and the resulting device are disclosed. Embodiments include forming a via through an interlayer dielectric (ILD) and capping layer, down to a first metal layer; forming a moisture scavenging layer precursor over the ILD and on side and bottom surfaces of the via; annealing the moisture scavenging layer precursor, forming a moisture scavenging layer; forming a barrier/liner stack over the moisture scavenging layer; and depositing a second metal layer over the barrier/liner stack and filling the via and trench.
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