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Photoresist Employing Photodimerization Chemistry and Method for Manufacturing Organic Light Emitting Diode Display Using the Same

机译:使用光二聚化化学的光致抗蚀剂以及使用该光致抗蚀剂制造有机发光二极管显示器的方法

摘要

A highly fluorinated photoresist employing a photodimerization chemistry and a method for manufacturing an organic light emitting diode display using the same. The photoresist includes a copolymer that is made from two different monomers. When the copolymer is used as a photoresist, the photoresist has the characteristic that it becomes insoluble when exposed to an ultraviolet light having a wavelength of 365 nm.
机译:采用光二聚化化学的高度氟化的光刻胶以及使用该光刻胶的有机发光二极管显示器的制造方法。光致抗蚀剂包括由两种不同单体制成的共聚物。当该共聚物用作光致抗蚀剂时,该光致抗蚀剂具有当暴露于波长为365nm的紫外光时变得不溶的特性。

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