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Laser-initiated exfoliation of group III-nitride films and applications for layer transfer and patterning
Laser-initiated exfoliation of group III-nitride films and applications for layer transfer and patterning
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机译:激光引发的Ⅲ族氮化物膜剥落及其在层转移和构图上的应用
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摘要
A pulsed laser-initiated exfoliation method for patterning a Group III-nitride film on a growth substrate is provided. This method includes providing a Group III-nitride film a growth substrate, wherein a growth substrate/Group III-nitride film interface is present between the Group III-nitride film and the growth substrate. Next, a laser is selected that provides radiation at a wavelength at which the Group III-nitride film is transparent and the growth substrate is absorbing. The interface is then irradiated with pulsed laser radiation from the Group III-nitride film side of the growth substrate/Group III-nitride film interface to exfoliate a region of the Group III-nitride from the growth substrate. A method for transfer a Group-III nitride film from a growth substrate to a handle substrate is also provided.
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