Systems and methods for inhibiting contamination enhanced laser induced damage (CELID) based on fluorinated self-assembled monolayers disposed on optics

摘要

Embodiments of the present invention provide systems and methods for inhibiting contamination enhanced laser induced damage (CELID) based on fluorinated self-assembled monolayers (F-SAMs) disposed on optics. For example, a coating for inhibiting CELID to an optic disposed in a sealed gas environment or vacuum may include an F-SAM that includes a fluorinated hydrocarbon tail group covalently bound to the optic by a head group. The coating may be formed by heating the optic and a liquid-phase precursor of the F-SAM to generate a gas-phase precursor, and exposing the heated optic to the gas-phase precursor for a period of time sufficient for the gas-phase precursor to coalesce at and covalently bond to the optic and form the F-SAM. The optic may include silica, and the F-SAM may include a siloxane group covalently bound to the silica.