首页>
外国专利>
Optical modulator and optical modulation device with zigzag electrode and waveguide arm alignment
Optical modulator and optical modulation device with zigzag electrode and waveguide arm alignment
展开▼
机译:具有锯齿形电极和波导臂对准的光调制器和光调制装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
An optical modulator includes a plurality of electrode pads arranged in a zigzag alignment; two arms which are partially bent to circumvent the electrode pads so as to carry out optical phase modulation at various parts based on voltages input via the electrode pads; an optical branch structure branching the arms; and an optical coupling structure aggregating the arms together. Each arm is made of a silicon-base electro-optic element including a substrate; a first conductive semiconductor layer having a rib waveguide structure; a dielectric layer deposited on the rib waveguide structure; and a second conductive semiconductor layer deposited on the dielectric layer. The first conductive semiconductor layer is connected to first electrode wires via first contacts, while the second conductive semiconductor layer is connected to second electrode wires via second contacts. Thus, it is possible to miniaturize the optical modulator which can operate at a low voltage.
展开▼