首页>
外国专利>
Tilt mode accelerometer with improved offset and noise performance
Tilt mode accelerometer with improved offset and noise performance
展开▼
机译:倾斜模式加速度计,具有改善的失调和噪声性能
展开▼
页面导航
摘要
著录项
相似文献
摘要
A single-axis tilt-mode microelectromechanical accelerometer structure. The structure includes a substrate having a top surface defined by a first end and a second end. Coupled to the substrate is a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot point on the substrate between the first end and the second end and a second asymmetrically-shaped mass suspended above the substrate pivotable about a second pivot point on the substrate between the first end and the second end. The structure also includes a first set of electrodes positioned on the substrate and below the first asymmetrically-shaped mass and a second set of electrodes positioned on the substrate and below the second asymmetrically-shaped mass.
展开▼