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Processes for in-situ annealing of TMR sensors
Processes for in-situ annealing of TMR sensors
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机译:TMR传感器的原位退火工艺
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摘要
A method in one embodiment includes applying a current to a lead of a tunneling magnetoresistance sensor for inducing joule heating of the lead or a heating layer, the level of joule heating being sufficient to anneal a magnetic layer of the sensor; and maintaining the current at the level for an amount of time sufficient to anneal the tunneling magnetoresistive (TMR) sensor. Additional systems and methods are also presented.
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