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Smooth seed layers with uniform crystalline texture for high perpendicular magnetic anisotropy materials
Smooth seed layers with uniform crystalline texture for high perpendicular magnetic anisotropy materials
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机译:光滑的晶种层,具有均匀的晶体织构,适用于高垂直磁各向异性材料
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摘要
A method for fabricating a perpendicular magnetic tunnel junction (pMTJ) device includes growing a seed layer on a first electrode of the pMTJ device. The seed layer has a uniform predetermined crystal orientation along a growth axis. The method also includes planarizing the seed layer while maintaining the uniform predetermined crystal orientation of the seed layer.
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