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SMOOTH SEED LAYERS WITH UNIFORM CRYSTALLINE TEXTURE FOR PERPENDICULAR MAGNETIC ANISOTROPY MATERIALS
SMOOTH SEED LAYERS WITH UNIFORM CRYSTALLINE TEXTURE FOR PERPENDICULAR MAGNETIC ANISOTROPY MATERIALS
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机译:垂直磁性各向异性材料的均匀晶种光滑种子层
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摘要
A method for fabricating a perpendicular magnetic tunnel junction (pMTJ) device includes growing a seed layer on a first electrode of the pMTJ device. The seed layer has a uniform predetermined crystal orientation along a growth axis. The method also includes planarizing the seed layer while maintaining the uniform predetermined crystal orientation of the seed layer.
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