Focusing electrode for cathode arrangement, electron gun, and lithography system comprising such electron gun.

摘要

The invention relates to a focusing electrode, comprising a cylindrical shell defining a cavity for accommodating a cathode body, and a front cover provided with a circular electron transmission aperture with a focusing surface on an outside, wherein a heat trapping surface is provided on an inner surface of the cylindrical shell, for receiving thermal radiation emitted by the cathode body during use, wherein the cylindrical shell comprises angular interspacings for accommodating a confining arrangement for confining the focusing electrode and/or the cathode body with respect to a support structure.