MASS FLOW CONTROL APPARATUS, SYSTEM, AND METHOD FOR USE IN GAS INTEGRATED DELIVERY SYSTEM

摘要

A mass flow control apparatus for use in an integrated gas delivery system, comprising an input terminal, an output terminal, a sensor unit (41), a flow control valve (42), and a control unit. The control unit comprises an A/D converter (43), a microprocessor (44), and a valve control circuit (45). The A/D converter (43) converts an actual setting signal (AS1) received by the input terminal into a first digital signal (DS1), and converts a flow rate detection signal (AS2) outputted by the sensor unit (41) into a second digital signal (DS2). The microprocessor (44) further comprises a storage module (641), a setting signal calibration module (642), and a calculation module (644). The valve control circuit (45) generates, on the basis of a control signal (S1), an openness control signal (S2), so as to control the flow rate control valve (42). Also provided is a mass flow control system comprising said apparatus, and a mass flow control method.