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Method and apparatus of mass flow controlling for use in integrated gas delivery system
Method and apparatus of mass flow controlling for use in integrated gas delivery system
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机译:用于集成气体输送系统的质量流量控制方法和装置
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摘要
An apparatus of mass flow controlling for use in an integrated gas delivery system, comprising an input terminal, a sensor unit, an electromagnetic valve, and a control unit. The control unit comprises an A/D converter, a microprocessor, and a valve control circuit. The A/D converter converts a flow rate setting signal inputted by the input terminal into a first digital signal, and converts a flow rate detection signal outputted by the sensor unit into a second digital signal. The microprocessor further comprises a control module and a calculation module. The valve control circuit opens the electromagnetic valve according to the first control signal only, and further regulates an openness of the electromagnetic valve according to the first control signal and the second control signal. It is concluded that response time of the mass flow control apparatus of the present invention is shorten, and control quality is improved.
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机译:一种用于集成气体输送系统的质量流量控制装置,包括输入端子,传感器单元,电磁阀和控制单元。该控制单元包括A / D转换器,微处理器和阀控制电路。 A / D转换器将由输入端子输入的流量设定信号转换为第一数字信号,并且将由传感器单元输出的流量检测信号转换为第二数字信号。微处理器还包括控制模块和计算模块。阀控制电路仅根据第一控制信号打开电磁阀,并根据第一控制信号和第二控制信号进一步调节电磁阀的开度。结论是,本发明的质量流量控制装置的响应时间缩短,并且控制质量提高。
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