ALUMINUM COMPOUND AND METHOD FOR FORMING ALUMINUM-CONTAINING FILM USING SAME

摘要

The present invention relates to: an aluminum compound represented by R₃Al · L (wherein each R independently comprises a linear or branched C_3-8 alkyl group; and L comprises a selection from the group consisting of a linear or cyclic ether and a linear or cyclic amine); an aluminum-containing film composition comprising the same; and a method for forming the aluminum-containing film using the same. The present invention provides an aluminum compound and a composition for forming an aluminum-containing film which are easy to store and transport due to increased heat-stability.