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METHOD FOR MEASURING SCANNING TRAJECTORY OF OPTICAL SCANNING DEVICE, SCANNING TRAJECTORY MEASUREMENT DEVICE, AND IMAGE CALIBRATION METHOD
METHOD FOR MEASURING SCANNING TRAJECTORY OF OPTICAL SCANNING DEVICE, SCANNING TRAJECTORY MEASUREMENT DEVICE, AND IMAGE CALIBRATION METHOD
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机译:光学扫描设备的扫描轨迹的测量方法,扫描轨迹的测量设备以及图像校准方法
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摘要
Provided is a scanning trajectory measuring device for an optical scanning device that allows the effect of stray light to be easily reduced and the accuracy in measuring the scanning trajectory to be improved. A scanning trajectory measuring device for an optical scanning device 100 generates a display image of an irradiated object by scanning the irradiated object with illumination light, the scanning trajectory measuring device including a screen 11 scanned with the illumination light, and an optical position detector 12 for detecting the position of an irradiation spot from the illumination light on the screen 11. The scanning trajectory measuring device measures the scanning trajectory of the illumination light with the optical position detector 12 sequentially detecting the position of the irradiation spots at a plurality of predetermined time points during the scanning on the screen.
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