A film thickness measurement value obtained by previously measuring a plurality of points on a measurement preparation substrate and the coordinates corresponding to the film thickness measurement value are acquired. A pixel value at each coordinates is extracted from a preparation image obtained by previously imaging the measurement preparation substrate by an imaging device. Correlation data between the pixel value extracted at each coordinates and the film thickness measurement value at each coordinates are generated. A substrate which is a film thickness measurement object is imaged by the imaging device to acquire the image, and a film thickness of a film formed on the substrate which is the film thickness measurement object is calculated based on the pixel value of the image and the correlation data.;COPYRIGHT KIPO 2016
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