APPARATUS TO INSPECT SURFACE DEFECT OF SUBJECT AND METHOD TO INSPECT SURFACE DEFECT OF SUBJECT

摘要

The present invention relates to an apparatus to inspect a surface defect of a subject, and a method to inspect the surface defect of the subject. The apparatus to inspect the surface defect of the subject comprises: a light source arranged in one lateral surface of the subject to irradiate light inside the subject; a first photographing part to collect emitted light from a defect of the subject, and to output an electric signal corresponding to the collected light; a second photographing part to collect emitted light from a defect of the subject in a position different from the first image output part, and to output the electric signal corresponding to the collected light; and a processing part to generate a first image and a second image based on the electric signal output from the first photographing part and the second photographing part, and to determine a type of defect in accordance to a difference between the first image and the second image.;COPYRIGHT KIPO 2016