LAMINATED KILN FURNITURE FOR HIGH-TEMPERATURE SINTERING SPUTTER TARGET AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to a kind of high temperature sinterings and its manufacturing method for being plasticized kiln furnitures sputtering target. Plasticizing kiln furnitures include: that a kind of kiln furnitures body layer carries out forming shape in plasticising and plate; At least one side kiln furnitures body layer is plasticized and be integrally formed with non-reactive layer and is wherein chemically reacted is not occurred and target. Therefore, in the sputtering target material of plasticizing process, the contact surface sputtering target material and above-mentioned plasticizing kiln furnitures chemically reacted between is suppressed. In addition, manufacturing defect is such as polluted, is bent in the sputtering target material of plasticizing process, or the sputtering target material of cracking does not interfere appearance; Productivity and yields; Manufacturing process simplifies; Shorten with the above-mentioned processing time. ;The 2016 of copyright KIPO submissions