MASKLESS EXPOSURE METHOD AND MASKLESS EXPOSURE DEVICE FOR PERFORMING THE EXPOSURE METHOD

摘要

The present invention relates to a kind of maskless exposure method and maskless exposure device execution are identical. Maskless exposure device includes: platform, sample substrate setting; A kind of shaven head, light are exposed on substrate; Light source part provides light to optical head. The optical head is exposed to the distance that substrate uses averaged focus. The distance of averaged focus is divided substrate by multiple regions, measures the corresponding region of pinpointed focus distance, the corresponding region of the distance of average pinpointed focus. Maskless exposure method can reduce the display device of defect. ;The 2016 of copyright KIPO submissions