首页> 外国专利> APPARATUS TO PATTERN GRAPHENE OXIDE THIN FILM, METHOD TO PATTERN GRAPHENE OXIDE THIN FILM, AND GRAPHENE OXIDE THIN FILM FABRICATED USING SAME

APPARATUS TO PATTERN GRAPHENE OXIDE THIN FILM, METHOD TO PATTERN GRAPHENE OXIDE THIN FILM, AND GRAPHENE OXIDE THIN FILM FABRICATED USING SAME

机译:图案化氧化石墨烯薄膜的装置,图案化氧化石墨烯薄膜的方法以及使用相同的方法制造的氧化石墨烯薄膜的装置

摘要

An apparatus to pattern a graphene oxide thin film, a method to pattern a graphene oxide thin film, and a graphene oxide thin film fabricated using the same are provided. According to an embodiment of the present invention, an apparatus (100) to pattern a graphene comprises: a spray nozzle (110) having an aperture (111) of which a width is narrower on a lower part formed on a lower end; at least a pair of electric field generation electrodes (120) installed adjacent to the aperture (111) of the spray nozzle to face the spray nozzle to form an AC electric field with specific intensity; a graphene solution supply unit (130) to supply graphene solution (10) to the spray nozzle (110); and a driving unit (140) to move the spray nozzle (110) along a predetermined pattern path. According to the apparatus to pattern the graphene oxide thin film, the graphene oxide thin film with a desired pattern is able to be patterned as the apparatus is able to form the graphene oxide thin film in a selected location on a top surface of a substrate by equidistantly forming at least one pair of electric field generation electrodes on an end of the spray nozzle. Moreover, in accordance with the method to pattern the graphene oxide thin film, a graphene oxide thin film is able to be fabricated solely using one patterning process without the requirement of a high-temperature CVD process to form a CVD graphene since the method uses the oxide graphene.;COPYRIGHT KIPO 2016
机译:提供了一种图案化氧化石墨烯薄膜的设备,一种图案化氧化石墨烯薄膜的方法以及使用该设备制造的氧化石墨烯薄膜。根据本发明的实施例,一种用于对石墨烯进行构图的设备(100)包括:喷嘴(110),该喷嘴(110)的孔(111)的宽度在形成于下端的下部上较窄。至少一对与喷嘴的孔(111)相邻安装的电场产生电极(120)面对喷嘴以形成具有特定强度的AC电场;石墨烯溶液供给单元(130),将石墨烯溶液(10)供给至喷嘴(110)。驱动单元(140)使喷嘴(110)沿着预定的图案路径移动。根据用于图案化氧化石墨烯薄膜的设备,能够图案化具有期望图案的氧化石墨烯薄膜,因为该设备能够通过以下方式在基板的顶表面上的选定位置中形成氧化石墨烯薄膜:在喷嘴的端部上等距地形成至少一对电场产生电极。此外,根据用于对氧化石墨烯薄膜进行图案化的方法,由于该方法使用氧化石墨烯薄膜,因此能够仅使用一种图案化工艺来制造氧化石墨烯薄膜,而不需要高温CVD工艺来形成CVD石墨烯。氧化物石墨烯。; COPYRIGHT KIPO 2016

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