FLUID ANALYSIS DEVICE, THERMAL FLOWMETER, MASS FLOW CONTROLLER, FLUID PROPERTY SPECIFICATION DEVICE, AND PROGRAM FOR FLUID ANALYSIS DEVICE

摘要

Based on a parameter on the upstream side which is a value related to a rate of change of the upstream voltage when the flow rate of the fluid to be measured changes and a downstream side parameter which is a value related to a rate of change of the downstream voltage when the flow rate of the fluid to be measured changes The fluid eigenvalue indicating the inherent value according to the thermal conductivity is calculated.