METHOD FOR FABRICATING GATING HYSTERESIS-FREE CARBON NANOTUBE SENSOR

摘要

An objective of the present invention is to provide a method for manufacturing a gating hysteresis-free carbon nanotube sensor which can improve sensor performance and remove gating hysteresis using an economical and simple method. The method for manufacturing a gating hysteresis-free carbon nanotube sensor comprises: (a) a step of forming an insulation film on a substrate; (b) a step of forming a plurality of electrodes on the insulation film; (c) a step of forming an OTS film on the insulation film; and (d) a step of adsorbing carbon nanotube particles on the electrodes.