MANUFACTURING METHOD OF SUBSTRATE GRAPHENE GROWTH WITHOUT USING METAL CATALYST AND SUBSTRATE GRAPHENE GROWTH WITHOUT USING METAL CATALYST

摘要

A kind of method of the manufacturing method without growth graphene in the substrate of catalyst is provided, includes the following steps: (one) preparation without catalyst layer substrate; (2) etching gas of carbonaceous gas is provided, is carried out low pressure chemical vapor deposition (LPCVD); (3) supply etching gas works as supply carbonaceous gas without catalyst layer to grow graphene in no catalyst layer; D grows graphene in substrate, and saving bit by bit continuous removal institute in no catalyst, whether there is or not catalyst layers, and LPCVD process steps c is simultaneously continuously carried out by the etching gas. ;The 2016 of copyright KIPO submissions