MANUFACTURING METHOD OF SUBSTRATE GRAPHENE GROWTH WITHOUT USING METAL CATALYST AND SUBSTRATE GRAPHENE GROWTH WITHOUT USING METAL CATALYST AND MANUFACTURING DEVICE

摘要

A kind of manufacturing method is provided, graphene is grown on the substrate of no catalyst, the method for growth graphene and a kind of device making method in no catalyst substrate. The following steps of graphene are grown on the substrate of manufacturing method no catalyst of the invention:. Substrate is set; b. Supply carbonaceous gas and the chemical vapor deposition (ECR-CVD) for carrying out electron cyclotron resonance plasma enhancing; And c. Graphene is grown in substrate, passes through van der Waals type heteroepitaxial growths without catalyst layer. ;The 2016 of copyright KIPO submissions