ETCHANT COMPOSITION FOR MOLYBDENUM-CONTAINING METAL LAYER, AND MANUFACTURING METHOD OF ARRAY SUBSTRATE USING SAME FOR LIQUID CRYSTAL DISPLAY DEVICE

摘要

The present invention relates to an etchant composition for a molybdenum (Mo)-containing metal layer, and to a manufacturing method of an array substrate using same for a liquid crystal display device. More particularly, the etchant composition for a Mo-containing metal layer comprises hydrogen peroxide, a fluorine compound, an azole-based compound, glycine, and water. The etchant composition exhibits excellent etching profile, and minimizes damage to glass and passivation.;COPYRIGHT KIPO 2016