首页> 外国专利> View port for observing ingot growing process and ingot growing apparatus having the same

View port for observing ingot growing process and ingot growing apparatus having the same

机译:用于观察锭生长过程的观察口和具有该观察口的锭生长设备

摘要

The present invention provides a view port for observing an interior of a chamber for providing a space in which an ingot growing process is performed, the viewport being provided at one side of the chamber and having a hole connected to the inside of the chamber; A window portion disposed above the body portion, the window portion sealing the hole and transmitting light inside the chamber; And a window cleaner installed on the window part and cleaning the lower surface of the window part. According to the present invention, the glass contamination of the view port can be efficiently cleaned while maintaining the closed state of the chamber. The ingot growing inside the chamber can be clearly observed through the view port, and the process data such as the diameter of the ingot to be grown can be accurately measured. Therefore, there is an advantage that the ingot of high quality can be produced by controlling the process conditions through the precisely measured process data.
机译:本发明提供一种观察口,该观察口用于观察腔室内部,以提供进行晶锭生长过程的空间,该视口设置在腔室内的一侧并具有连接至腔室内部的孔;窗口部分设置在主体部分上方,该窗口部分密封该孔并使室内的光线透射。然后,将窗户清洁器安装在窗户部分上并清洁窗户部分的下表面。根据本发明,可以在维持腔室的关闭状态的同时有效地清洁视口的玻璃污染。通过观察口可以清楚地观察到在室内生长的晶锭,并且可以精确地测量诸如要生长的晶锭的直径之类的工艺数据。因此,具有可以通过通过精确测量的过程数据控制过程条件来生产高质量铸锭的优点。

著录项

  • 公开/公告号KR101605590B1

    专利类型

  • 公开/公告日2016-03-22

    原文格式PDF

  • 申请/专利权人 주식회사 엘지실트론;

    申请/专利号KR20130149401

  • 发明设计人 신윤광;최현교;

    申请日2013-12-03

  • 分类号C30B15/20;C30B15/14;

  • 国家 KR

  • 入库时间 2022-08-21 14:12:49

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