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View port for observing ingot growing process and ingot growing apparatus having the same
View port for observing ingot growing process and ingot growing apparatus having the same
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机译:用于观察锭生长过程的观察口和具有该观察口的锭生长设备
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摘要
The present invention provides a view port for observing an interior of a chamber for providing a space in which an ingot growing process is performed, the viewport being provided at one side of the chamber and having a hole connected to the inside of the chamber; A window portion disposed above the body portion, the window portion sealing the hole and transmitting light inside the chamber; And a window cleaner installed on the window part and cleaning the lower surface of the window part. According to the present invention, the glass contamination of the view port can be efficiently cleaned while maintaining the closed state of the chamber. The ingot growing inside the chamber can be clearly observed through the view port, and the process data such as the diameter of the ingot to be grown can be accurately measured. Therefore, there is an advantage that the ingot of high quality can be produced by controlling the process conditions through the precisely measured process data.
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