LINEAR DIELECTRIC BARRIER DISCHARGE PLASMA GENERATOR AND PLASMA PROCESSING SYSTEM INCLUDING THE SAME

摘要

The present invention relates to a linear dielectric barrier discharge plasma generator and a plasma processing system including the same. A linear dielectric barrier discharge plasma generator of the present invention includes: a reactor body connected to a ground by a hollow bar shape and generating plasma by being supplied with gas through a gas inlet; A linear plasma jet opening provided on at least one side of the reactor body for linearly injecting the plasma generated in the reactor body along the longitudinal direction of the reactor body; A power supply electrode unit provided on the reactor body so as to face the inner surface of the reactor body having the linear plasma jetting port; A dielectric part provided between the reactor body and the power supply electrode part; And a power source for supplying power to the power electrode unit, and generates a plasma at atmospheric pressure. The linear dielectric barrier discharge plasma generator of the present invention and the plasma processing system including the same can linearly process a target object by using plasma in a wide range by injecting plasma. In addition, a large amount of carbon fiber can be treated by spraying plasma, and a large amount of carbon fiber can be treated at a time.