FDC TREND CHANGE ANALYSIS METHOD OF FDC DATA

摘要

According to the present invention, a trend change analyzing method of FDC data capable of checking how much a separation degree per a variable influences a yield. According to the present invention, the method comprises: a reference trend generating step of generating a trend of a reference which is a trend of a proper trend maintenance interval; a comparison even trend generating step configured to generate a trend of a comparison event except the trend of the reference; a monitoring step of calculating separation which is a degree, at which the comparison event generates a trend change, compared to the trend of the reference; and an analyzing step of analyzing influences of the trend change affecting a yield.