TANK OF A CAPACITIVE MICROWORKED CONVERTER OF A PRELIMINARY PRESSED TYPE WITH A PLUG

摘要

1. A cell (10) of a pre-pressed type capacitive microprocessing transducer containing: - a substrate (12), - a membrane (14), while a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) contains the hole (15) and the edge part (14a) surrounding the hole (15), and the edge part (14a) of the membrane (14) is pressed against the substrate (12), and the plug (30) located in the hole (15) of the membrane (14) ), and the plug (30) is located only in the subregion (A) of the complete membrane region (A); while the plug (30) is in contact with or attached to the substrate (12) .2. A cell according to claim 1, wherein the opening of the membrane (14) is located in the central region of the complete membrane region (A). 3. A cell according to claim 1, wherein the plug (30) comprises a leg part (30a) located on the substrate (12) and a head part (30b) located on the edge part (14a). 4. A cell according to claim 1, wherein the plug (30) comprises a recess formed by removing a stressed layer having a predetermined value of mechanical stress relative to the membrane (14) .5. A cell according to claim 1, further comprising a stress layer (17) on the membrane (14), wherein the stress layer has a predetermined value of mechanical stress. A cell according to claim 1, wherein the plug (30) is made of nitride, silicon dioxide, or a combination thereof. 7. A cell according to claim 1, further comprising a coating layer (40) located on the membrane (14) and / or plug (30) .8. A cell according to claim 1, further comprising a first electrode (16) on or in the substrate (12) and / or a second electrode (18) on or in the membrane (14) .9. A cell according to claim 8, wherein the second electrode (18) is a ring electrode. A cell according to claim 1, wherein the cavity (20) is an annular cavity. 11. A cell according to claim 1, wherein the cell is a cell e�