PRE CELL pressed against capacitive Converters, obtained by micromachining, and pressing onto an annular shape REGION

摘要

1. Pre-pressed cell (10) of the capacitive transducer, obtained through micromachining, comprising: - a substrate (12) comprising a first electrode (16), - a membrane (14) comprising a second electrode (18), - the outer region (22); wherein the membrane (14) is fixed on the substrate (12), - the inner region (20) disposed within the outer region (22), or surrounded by it, wherein the membrane (14) is pressed against the substrate (12) in a first pressed region (24) is annular form located in the interior region (20); and wherein the cell has a first region (26) of the transformation that is inside the first pressed area (24) surrounded by a ring-shaped or it and a second region (27) converting, located outside the first pressed region (24) of annular shape surrounding or ee.2. A cell according to Claim. 1, wherein the second electrode (18) is located in any of the first region (26) and converting the second region preobrazovaniya.3. A cell according to Claim. 1 further comprising a second pressed region (28) disposed in the interior region (20) and a fourth electrode (21) disposed in the second pressed region (28) .4. The cell of claim. 2 or 3, wherein the second electrode (18) is located, at least in the vicinity of the first pressed region (24) annular formy.5. A cell according to Claim. 1, wherein the second electrode (18) and / or the first electrode (16) have an annular formu.6. A cell according to Claim. 1, wherein the first pressed region (24) of annular shape centered about the center (C) of the cell (10) or membrane (14) .7. A cell according to Claim. 1, wherein the membrane (14) is further pressed against the substrate (12) pressed against the second region (28) disposed in the interior region (20) .8. The cell of claim. 7, wherein the second pressed region (28) is located in tse