DIFFRACTION PERIODIC MICROSTRUCTURE BASED ON POROUS SILICON

摘要

FIELD: chemistry.;SUBSTANCE: invention relates to diffraction periodic microstructures for visible range, based on porous silicon. In diffraction periodic microstructure based on porous silicon, comprising a substrate, made of monocrystalline silicon with a diffraction periodic microstructure, formed diffraction periodic microstructure based on porous silicon comprises ion-synthesised metal-containing nanoparticles, dispersed in surface region of substrate at layer thickness from 10 to 200 nm with metal concentration of 2.5·10²⁰-6.5·10²³ atoms/cm³.;EFFECT: technical effect consists in creation of a diffraction periodic microstructure based on porous silicon with different metal-containing nanoparticles.;1 cl, 20 dwg