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Dual mode - mass flow verification - and mass flow in front of the direction of delivery and corresponding method

机译:双模式-质量流量验证-输送方向前的质量流量以及相应的方法

摘要

Mass flow supplying in front of the direction of the masses flow supplying a fluid and for mass flow verification of the fluid, wherein the mass flow in front of the direction of delivery comprises:a chamber (130; 230; 430);an inlet valve (120; 220; 420), which is configured, the flow of the fluid in the chamber (130; 230; 430) to control or regulate the;an outlet valve (150; 250; 450), which is configured, the flow of the fluid from the chamber (130; 230; 430) to control or regulate the;a pressure sensor (170; 270; 470), which is configured, a pressure within the chamber (130; 230; 430) to be measured; anda controller (160; 260; 460);the controller (160; 260; 460) is configured in a first mode the opening and closing of the intake valve (120; 220; 420) and of the exhaust valve (150; 250; 450) to regulate a measurement of the flow rate of the fluid by means of a device (110) to verify;the controller (160; 260; 460) is further configured in a second mode the opening and closing of the inlet - and of the exhaust valve (120; 220; 420, 150; 250; 450) is to be regulated, in order to achieve a desired amount of fluid from the chamber (130; 230; 430) into an output of processing a direction, andthe controller (160; 260; 460) is configured to receive an input signal, the a choice between the first and the second mode, and in response to the receiving input signal in a first or second mode to operate;the controller (160; 260; 460) is configured in the second mode a mass of the fluid to measure which, during a period of time into the chamber (130; 230; 430) flows, and then a desired mass of the fluid into an output processing to provide a direction, by moving the opening and closing of the intake valve (120; 220; 420) and of the exhaust valve (150; 250; 450) regulates.
机译:在向流体供应的质量流的方向之前供应的质量流,以及用于对流体进行质量流验证的质量流,其中,在输送方向的前面的质量流包括:腔室(130; 230; 430);入口阀(120; 220; 420),其被配置为在腔室(130; 230; 430)中的流体的流动,以控制或调节被配置为,出口阀(150; 250; 450)的流动。来自腔室(130; 230; 430)的流体以控制或调节压力传感器(170; 270; 470),该压力传感器配置为要测量的腔室(130; 230; 430)内的压力;控制器(160; 260; 460);控制器(160; 260; 460)在第一模式下构造成进气门(120; 220; 420)和排气门(150; 250; 250)的打开和关闭。 450)以通过装置(110)调节流体流量的测量以验证;控制器(160; 260; 460)进一步配置为第二模式下入口的打开和关闭-以及调节排气阀(120; 220; 420、150; 250; 450),以实现从腔室(130; 230; 430)到处理方向输出的所需量的流体,并且控制器(160; 260; 460)被配置为接收输入信号,在第一和第二模式之间进行选择,并响应于在第一或第二模式中接收到的输入信号来操作;控制器(160; 260; 460)。 460)在第二模式中配置为要测量的流体的质量,该流体的质量在一段时间内流入腔室(130; 230; 430)中,然后测量所需的流体质量。通过移动进气门的开启和关闭(120; 220; 420)和排气门(150; 250; 450)进行调节。

著录项

  • 公开/公告号DE112009003602B4

    专利类型

  • 公开/公告日2016-03-31

    原文格式PDF

  • 申请/专利权人 MKS INSTRUMENTS INC.;

    申请/专利号DE20091103602T

  • 发明设计人 JUNHUA DING;KAVEH ZARKAR;

    申请日2009-11-18

  • 分类号G01F1/00;G01F11/00;G05D7/06;

  • 国家 DE

  • 入库时间 2022-08-21 14:10:20

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