A method for detecting of oxygen or air in a vacuum processing before the direction as well as air leak determination method

摘要

A method for detecting of oxygen or air in a vacuum processing chamber, comprising:Providing a grating (102), an ion catcher (103), and a filament (101), in which an oxide is formed on a metal surface;Application of an incandescent filament current to the incandescent filament (101), wherein a thermionic electrons, which are generated by the generation of heat, by the filament (101) are emitted, wherein the to the incandescent filament (101) flowing incandescent filament current is controlled such that an emission current which, due to the delivered therm ionic electrons, which on the grid (102), is produced, is constant, whereby the delivered therm ionic electrons an undefined type of gas, which in the vacuum processing chamber is present, by means of collision with molecules of the gas prior to arrive at the grid (102) ionizing, wherein positive ions are generated;Collection of the ions with the ions collecting device (103); andMeasuring a value of the incandescent filament current, and detecting whether the in the vacuum processing chamber available gas oxygen or air is, on the basis of the measured value, wherein the pressure in the vacuum processing chamber 5 × 10^–4 Pa or longer, and the detection of a comparison of the incandescent filament current measured value with at least one reference incandescent filament current value, which for at least one of the gases from the group consisting of nitrogen, oxygen and air for at least one pressure of 5 × 10^–4 Pa or more in the vacuum processing chamber was determined in advance, comprises.