Method for the microscopic measurement of samples by means of short-coherent interferometry

摘要

Method for the microscopic measurement of a sample (250), in particular by means of depth-resolved phase measurements of scattering or multilayered samples (250), in particular with a measuring device (200) for optical coherence tomography, wherein the sample (250) is combined with light (21) of a light source (20 ), wherein the light (23) modified by the sample (250) is brought into interference with reference light (22) on a light sensor (10), the resulting light signal being converted by the light sensor (10) into a measuring signal (11) and, by detecting and processing the measurement signal (11), a depth-resolved interference signal (30) is determined, wherein the depth-resolved interference signal (30) is associated with a wavelength of the light (21) and an entire depth range (30.2) of the depth-resolved interference signal (30) , and wherein the measurement signal (11) is processed or detected such that interference of light (23) from other depths or region in the sample (250) is suppressed or predominantly prevented, characterized in that from the depth-resolved interference signal (30) phase images (42) are determined such that the determined phase images (42) respectively different wavelengths of the light (21) and a selected depth range (30.1) of the depth-resolved interference signal (30), the selected depth range (30.1) extending within the entire depth range (30.2) and having a smaller extent than the entire depth range (30.2), and an unpacked phase image (50) therethrough is generated, that at least two of the determined phase images (42) are compared with each other.