Impedance adaptation arrangement for a gas laser excitation arrangement and the gas laser excitation arrangement

摘要

Impedance adaptation arrangement for a gas laser excitation arrangement (1, 1 ''), with a high frequency connection line (11b, 11b'') which at a first connection point (20.1, 20.1 '') to a power source (20) and at a second connection point (10.1, 10.1'') to a gas laser - electrode (5, 5 '') can be connected, is characterized in that the impedance of the high frequency connection line (11b, 11b'') at least in one portion (24, 24 '') by changing the embodiment, in particular of a parameter, the high frequency connection line (11b, 11b'') in this section changes.