Apparatus and method for increasing the accuracy of a oct - measuring system for laser material processing

摘要

The invention relates to a measuring device (10) for a machining system for machining a workpiece (22) by means of a high-energy beam (38), wherein said measuring device (10) is provided for this purpose, by means of a measuring beam (14) position measurements on the workpiece (22), wherein the measuring device (10) a measuring beam source (12) for generating a measuring beam (14) by means of an optical coherence tomographs, wherein the measuring beam (14) in the processing beam (38) and can be applied by means of a processing beam optical system onto the workpiece (22) can be, and wherein the measuring device (10) further comprises a spatially resolving sensor (16), which is designed, a of the measuring beam (14) of the measured region of the workpiece (22) by means of a sensor beam (18) to detect and on the basis of spatially resolving to generate information. In this case, it is provided that the measuring device (10) is designed for this purpose, on the basis of the spatially resolving sensor (16) is made available by the spatially resolving information a position (l) of the beam (38) on the workpiece (22) to determine and taking into account a measuring beam position (m) on the workpiece (22) a relative offset between the processing beam (38) and the measuring beam (14) to determine.