首页> 外国专利> METHOD FOR USING A PECVD DEVICE FOR IMPLEMENTING A PLASMA CLEANING PHASE AND / OR PLASMA DEPOSITION PHASE, AND CORRESPONDING EPCVD DEVICE

METHOD FOR USING A PECVD DEVICE FOR IMPLEMENTING A PLASMA CLEANING PHASE AND / OR PLASMA DEPOSITION PHASE, AND CORRESPONDING EPCVD DEVICE

机译:用于实现等离子体清洁阶段和/或等离子体沉积阶段的PECVD设备的方法,以及对应的EPCVD设备

摘要

There is provided a method of using a plasma enhanced chemical vapor deposition device (100) comprising a deposition chamber (10) comprising: - a set of shields (3a-3f) disposed on the circumference of the inner wall of the enclosure (10) and forming, with the enclosure, an anode-type electrode, - a cathode-type main electrode (4) arranged along a central axis of the enclosure (10) and for supporting at least one object to be treated, said method being characterized in that it comprises a step of activating a cathode-type auxiliary electrode (8) in at least one of the following phases: plasma cleaning, - a plasma deposition phase in which the main electrode is activated, said cathode-type auxiliary electrode (8) extending parallel to the internal surface of the protective shield set (3a-3f) and near the set of shields (3).
机译:提供了一种使用包括沉积室(10)的等离子体增强化学气相沉积装置(100)的方法,该沉积室包括:-设置在外壳(10)的内壁的圆周上的一组屏蔽(3a-3f)。所述方法的特征在于,所述方法的特征在于:沿所述外壳(10)的中心轴线布置并与所述外壳一起形成阳极型电极,-阴极型主电极(4),以支撑至少一个待处理物体。其包括以下步骤中的至少一个步骤中激活阴极型辅助电极(8)的步骤:等离子清洁,-激活主电极的等离子体沉积阶段,所述阴极型辅助电极(8)平行于防护罩组(3a-3f)的内表面并在防护罩组(3)附近延伸。

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