CHEMICAL SENSOR, CHEMICAL SENSOR MODULE, BIOMOLECULE DETECTION DEVICE AND BIOMOLECULE DETECTION METHOD

摘要

[Object] To provide a chemical sensor capable of detecting a biomolecule with high accuracy, a chemical sensor module, a biomolecule detection apparatus, and a biomolecule detection method. [Solving Means] A chemical sensor includes a substrate, an on-chip lens, and a flattening layer. On the substrate, a plurality of photodiodes are formed to be arranged in a planar form. The on-chip lens collects incident light to the photodiodes and is provided on the substrate. The flattening layer covers and flattens the on-chip lens to form a probe holding surface for holding a probe material.