CHEMICAL SENSOR CHEMICAL SENSOR MODULE BIOMOLECULE DETECTION DEVICE AND BIOMOLECULE DETECTION METHOD

摘要

The present invention provides a chemical sensor, a chemical sensor module, a biomolecule detection device, and a biomolecule detection method capable of detecting biomolecules with high accuracy. The chemical sensor of the present technology includes a substrate, an on-chip lens, and a planarization layer. The substrate is provided with a plurality of photodiodes arranged in a planar shape. An on-chip lens focuses incident light provided on the substrate onto the photodiode. The planarization layer coats and flattens the on-chip lens and forms a probe support surface for supporting the probe material.