Integrating magnetic field compensation for use in scanning and transmission electron microscopes

摘要

The arrangement has a device (10) for providing electrically charged particles. A chamber (20) is provided with a sample holder (23), on which a sample (30) is positioned such that the sample is indicated, tested and processed by a unit of the particles, which are provided by the device. A system (40) is provided for magnetic field compensation in the spatial direction (X,Y,Z) with a bucking coil (41), which is provided by a winding of a conductor, where a wall (21) of the chamber has a receiving area (21a,21b) for a section of the bucking coil. An independent claim is included for a method for indicating, testing and processing of sample by unit of electrically charged particle.