In-situ visualization of local magnetic fields using low-energy electron beam in scanning electron microscope

摘要

This study demonstrates clear visualization of the magnetic field around a two-dimensional magneticmaterial using the Lorentz deflection of a primary electron beam with low accelerating voltage.A horizontal or vertical grid, positioned downstream of the specimen, appears on the scanningmicroscope image where the field of view shows both the specimen edge and the grid below. Anobserved deformation in the grid shape is strongly correlated with the local magnetic field and isrelated to the beam deflection induced by the Lorentz force. A detection sensitivity of 0.5 G isachieved using a primary electron beam with an energy of 1 keV.