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Method for forming DLC film on spline shaft and hot cathode PIG plasma CVD device
Method for forming DLC film on spline shaft and hot cathode PIG plasma CVD device
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机译:在花键轴上形成DLC膜的方法及热阴极PIG等离子体CVD装置
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摘要
Plural spline shafts (10) are arranged around columnar plasma (70a), and plural spline shafts (10) are coaxially aligned in a direction that the columnar plasma (70a) extends within a vacuum chamber (60). The plural coaxially aligned spline shafts (10) are positioned so that axial gap is formed between the respective male spline sections (16). The axial gap of the plural male spline sections (16) is positioned at a center of the columnar plasma (70a) in the direction that the columnar plasma (70a) extends.
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