DEVICE FOR THE WET-CHEMICAL TREATMENT OF OBJECTS, IN PARTICULAR FLAT, IN PARTICULAR DISK-SHAPED ITEMS SUCH AS SEMICONDUCTOR SLICES, SUBSTRATES, OR THE LIKE

摘要

The invention relates to a device for the wet-chemical treatment of objects, in particular flat, in particular disk-shaped items such as semiconductor wafers, substrates, or the like (12, 14), comprising: a drum (10), which has a loading opening (11) and a drum bottom (24); a retainer (16, 18) for the objects (12, 14), which retainer is arranged in the drum (10) in such a way that the retainer can be rotated about an axis of rotation; a motor (20) having a drive shaft (26) for driving the retainer (16, 18), which drive shaft passes through the drum bottom (24); one or more chemical spray nozzles (22) for spraying the objects (14) held in the retainer (16, 18) with chemicals; and one or more cleaning spray nozzles (30) for spraying at least part of the inside of the drum (10) with a cleaning agent.