FLATNESS MEASUREMENT SYSTEM AND FLATNESS MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a flatness measurement system and a flatness measurement method which exhibit good workability, and with which it is possible to measure the flatness of a plane with high accuracy.;SOLUTION: A flatness measurement device 1 is configured from a laser scanner 2, an arithmetic processing device 3 represented by a PC, and a target 4 for a reference point. At least two of the target 4 for a reference point are installed at prescribed positions on a measurement surface. The laser scanner 2 scans the target 4 for a reference point and the measurement surface and acquires point group data. The arithmetic processing device 3 calculates a virtual reference plane including the reference point of the target 4 for a reference point and facing the measurement surface on the basis of the obtained point group data, and measures the flatness of the measurement surface on the basis of the virtual reference plane and the point group data of the measurement surface.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2017,JPO&INPIT