Simple uncertainty evaluation method for an interferometric flatness measurement machine using a calibrated test flat

摘要

A simple method of evaluating the measurement capability of a practical Fizeau-type flatness measurement machine is proposed. In this method, by measuring only the peak-to-valley (PV) value of a calibrated test flat, the measurement capability of the flatness measurement machine for the PV value is evaluated while maintaining the traceability of the measurement. A simple approximate equation for estimating the measurement capability of the flatness measurement machine is presented.