Gyroscope sensor element, gyro sensor unit, electronic instrument and manufacturing method of gyro sensor unit

摘要

PROBLEM TO BE SOLVED: To provide a vibration piece capable of suppressing leakage output without lowering mechanical strength and also to provide a sensor unit and an electronic apparatus with the vibration piece.SOLUTION: A vibration piece includes: a base part; driving vibration arms extending from one end of the base part; detecting vibration arms extending from the other end on a side opposite to one end of the base part; adjusting vibration arms extending from the base part to a side opposite to the driving vibration arms; and support parts extending from the base part and fixed to a substrate. An output signal of the adjusting vibration arms has an inverse phase with respect to an output signal of leakage vibration of the detecting vibration arms.SELECTED DRAWING: Figure 1